For atomic force microscopy imaging of samples with high aspect ratio features such as deep trenches or contact holes in semiconductor devices NANOSENSORS™ offers the High Aspect Ratio AFM tips AR5, AR5T, AR10 and AR10T with near-vertical AFM tip sidewalls.

AFM tip - AR5 type:
These AFM tips are FIB (Focused Ion Beam) milled to achieve a high aspect ratio portion better than 5:1 at the end of the silicon AFM tip. The length of the high aspect ratio portion of the AFM tip is > 2 µm.

Available types:
AR5—NCH ( standard tapping mode/dynamic mode AFM cantilever) :
Typical force constant: 42 N/m
Typical resonance frequency: 330 kHz

AR5—NCHR ( standard tapping mode/dynamic mode AFM cantilever with aluminum reflex coating on the backside of the AFM cantilever):
Typical force constant: 42 N/m
Typical resonance frequency: 330 kHz

AR5T-NCHR ( tilt compensated AFM tip with standard tapping mode/dynamic mode AFM cantilever and aluminum reflex coating on the backside of the AFM cantilever):
Typical force constant: 42 N/m
Typical resonance frequency: 330 kHz

AR5-NCLR:
Typical force constant: 48 N/m
Typical resonance frequency: 190 kHz


AFM tip AR10 type:
These AFM tips are FIB (Focused Ion Beam) milled to achieve a high aspect ratio portion better than 10:1 at the end of the silicon AFM tip. The length of the high aspect ratio portion of the AFM tip is > 1.5 µm.

Available types:
AR10-NCHR (standard tapping mode/dynamic mode AFM cantilever with reflex coating on the backside of the AFM cantilever )
Typical force constant: 42 N/m
Typical resonance frequency: 330 kHz

AR10T-NCHR ( tilt compensated AFM tip on standard tapping mode/dynamic mode AFM cantilever with aluminum reflex coating on the backside of the AFM cantilever):
Typical force constant: 42 N/m
Typical resonance frequency: 330 kHz

Please contact us for more information or have a look at the
High Aspect Ratio AFM Probes brochure: http://nanosensors.com/High_Aspect_Ratio_Probes.pdf