P-753 LISA Piezo Stages / Actuators for X and Z-Motion with Direct Metrology for NanoAutomation®
- Price:
- Request a Quote
- Vendor:
- PI (Physik Instrumente) LP
- Country:
- United States | Contact Details
-
• Unique Design: Both Piezo-Stage and Piezo Actuator
• Frictionless Precision Flexure Guiding System
• 0.05 nm Resolution
• Direct Metrology with Capacitive Sensors for Highest Precision
• Ultra-Fast Response, Very Compact
• PICMA® High-Performance Multilayer Piezo Drives
• ID-Chip for Auto Calibrate Function
• Vacuum Versions Available
PDF Datasheet -
PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 950+.
Visit company website
The contents of this site are copyright ©2005-2023 Nanowerk. All Rights Reserved.