• SML (e-beam resist)
  • SML (e-beam resist)

SML (e-beam resist)


Request the latest price from EM Resist Ltd

  • Daniel Royston,EM Resist Ltd
  • SML (e-beam resist)

Contact Details

  • EM Resist Ltd
  • Daniel Royston
  • Block 23, Alderley Science Park
  • Alderley Edge
  • Cheshire
  • United Kingdom
  • +44 (0) 1625704465

Contact Supplier

  • Daniel Royston,EM Resist Ltd

  • The high performance SML resist is a novel polymer that has been specifically designed to answer the demands of the EBL community. It can be simultaneously patterned into high resolution and high aspect ratio patterns, even at low acceleration voltages and without the aid of proximity effect correction.

    SML resist has been specifically designed to fit in with a standard PMMA process. No change in chemistry or process training is required.


    Very high resolution: < 10nm

    Very high aspect ratio:
    > 10:1 @ 30 kV
    >50:1 @ 100 kV

    Thickness: 30 nm – 2000 nm

    Superior LER/LWR

    Very straight sidewalls

    Excellent surface adhesion (HMDS not required)

    Excellent etch resistance

    Do you require a sample?
    Please visit or email [email protected] to speak to our sales or applications team

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