XY Single Module Precision Linear Stage Family Available in 4, 8, 12 Inch Travel

(Nanowerk News) In addition to their popular Air Bearing planar XY stages, a series of integrated XY stages with mechanical bearings is offered by global leader in precision motion systems, PI (Physik Instrumente). These integrated XY stages, engineered for higher loads, are available with 3-phase linear direct-drive motors for higher speed and ball screws for higher push/pull forces, respectively.
Available with nanometer resolution linear encoders, these XY stages are well-suited for applications in biotechnology, industrial automation, laser processing, and flat panel display testing and manufacturing.
Family of integrated XY motion stages
Family of integrated XY motion stages from PI

Integrated Design

The integrated mechanical design allows for a lower profile and improved geometric performance, when compared to modular XY-stage assemblies of two single axis translation stages bolted together. Due to the improved support, planar XY tables are stiffer and flex less compared to XY-combinations of single axis linear stages, especially when the individual axes are moved to their extreme positions.
The ball-screw variants – L-731, L-738, and L-741 – can be powered by stepper motors and servo motors, respectively. The direct-drive, linear-motor variants – V-731, V-738, and V-741 – are driven by an ironless 3-phase motor for cogging-free ultra-smooth motion, for highest demands on precision. Ironless motors allow smoother, vibration-free running over a wide velocity range. Both 3 stage families provide sensor resolution from 0.1µm to 0.001 µm, with mechanical position repeatability to 0.05 µm.
The V-738 shown above is driven by linear motors and equipped with linear encoders for nanometer level resolution. A large aperture allows transmitted light applications. Controlled by an ACS motion controller with EtherCat connectivity.
V-738, 4” XY Travel, Linear Motor, Aperture (150mm)
V-731, 8” XY Travel, Linear Motor
V-741, 12” XY Travel, Linear Motor
L-738, 4” XY Travel, Aperture (150mm), Ballscrew Drive
L-731, 8” XY Travel, Ballscrew Drive
L-741, 12” XY Travel, Ballscrew Drive
For even higher accuracy and motion performance, air bearing XY-stages such as the A-311 / A-322 PIGlide models are recommended.

Standard and Custom

PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.

About PI

PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,300 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.
Source: PI (press release)
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