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Nanowerk Catalog

Park Systems – Enabling Nanoscale Advances

Park Systems serves its customers with a complete range of AFM solutions including AFM systems, options, and software, along with global service and support.

Park Systems provides original and innovative AFM solutions for the most accurate nanoscale measurement. In nanoscale metrology, having data that is repeatable, reproducible, and reliable is just as crucial as resolution. The innovative crosstalk-elimination (XE) metrology platform ushered in a new era of nanometrology that overcomes non-linearity and non-orthogonality associated with conventional piezotube based systems. Park Systems' innovative AFM technology is a disruptive market force and it expands the application of nanometrology beyond the limits of conventional AFM technology.

Park Systems promotes sustainable, long-term growth of its AFM business by constantly seeking to address the changing needs of AFM users. Our comprehensive portfolio of products, software, services, and expertise is designed and engineered to help customers achieve the nanometrology performance that meets the needs and requirements of present and future applications. Since improvements in nanometrology today are key to enabling tomorrow's research, analysis, processing and product manufacturing, our innovative technology and market leadership in the field of nanometrology secure our future at the forefront of the AFM industry.

Products listed on Nanowerk

Park HDM Series

The task of identifying nanoscale defects is a very time consuming process for engineers working with media and flat substrates. P...

Park NX-Bio

As a life scientist, you want to see how biological materials look like at nanoscale resolution and how soft they are in liquid an...

Park NX-Hivac

High vacuum atomic force microscope for failure analysis Park NX-Hivac allows failure analysis engineers to improve the sensiti...

Park NX10

Park NX10 produces data you can trust, replicate, and publish at the highest nano resolution. From sample setting to full scan ima...

Park NX20

The premier choice for failure analysis. More powerful failure analysis solutions Park NX20 is equipped with unique features...

Park PTR Series

Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recessi...

Park SmartScan™

Bringing the power and versatility of AFM technology to everyone Park SmartScan is a revolutionary operating software for Park ...

Park Wafer Series

The only wafer fab AFM with automatic defect review Fully automated AFM solution for defect imaging and analysis that improves ...

Park XE-3DM

Park Systems has introduced the revolutionary XE-3DM, the completely automated AFM system designed for overhang profiles, high-res...

Park XE15

The Park XE15 includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researc...

Park XE7

Park XE7 has all the state-of-the-art technology you've come to expect from Park Systems, at a price your lab can afford. Designe...

Other Products

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Downloads (Brochure/Application Notes/Articles)

Non-Contact Mode AFM for Soft Biological Samples

The XE-series AFM with crosstalk elimination (XE) and high force Z-scanner has successfully solved the aforementioned problems by operating in the “...

 
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Non-Contact Mode AFM for Soft Biological Samples Details

  • The XE-series AFM with crosstalk elimination (XE) and high force Z-scanner has successfully solved the aforementioned problems by operating in the “True Non-Contact Mode” instead of tapping (intermittent contact) mode.

Non-Contact Mode AFM vs. Tapping Mode AFM

Park Systems’ crosstalk eliminated (XE) AFM successfully meets the feedback requirements for True Non-Contact AFM. To improve feedback speed, the XE...

 
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Non-Contact Mode AFM vs. Tapping Mode AFM Details

  • Park Systems’ crosstalk eliminated (XE) AFM successfully meets the feedback requirements for True Non-Contact AFM. To improve feedback speed, the XE-series Non-Contact utilizes a stacked piezo actuator rather than a piezoelectric tube scanner whose typical resonant frequency is less than 500 Hz.

NX-HDM brochure

Simply the best AFM for automatic defect review and surface roughness measurement The task of identifying nanoscale defects is a very time consumin...

 
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NX-HDM brochure Details

  • Simply the best AFM for automatic defect review and surface roughness measurement The task of identifying nanoscale defects is a very time consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy system that speeds up the defect review process by an order of magnitude through automated defect identification, scanning and analysis.

NX-Hivac brochure

High vacuum atomic force microscope for failure analysis Park NX-Hivac allows failure analysis engineers to improve the sensitivity of their meas...

 
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NX-Hivac brochure Details

  • High vacuum atomic force microscope for failure analysis Park NX-Hivac allows failure analysis engineers to improve the sensitivity of their measurements through high vacuum Scanning Spreading Resistance Microscopy (SSRM). Because high vacuum scanning offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide range of dope concentration and signal response in failure analysis applications.

NX-PTR brochure

The Fully Automated AFM for Accurate Inline Metrology of Hard Disk Head Sliders that makes doing great work simpler. Park Systems' PTR Series is a f...

 
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NX-PTR brochure Details

  • The Fully Automated AFM for Accurate Inline Metrology of Hard Disk Head Sliders that makes doing great work simpler. Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their production yield.

NX-Wafer brochure

The only wafer fab AFM with automatic defect review Fully automated AFM solution for defect imaging and analysis that improves defect review produc...

 
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NX-Wafer brochure Details

  • The only wafer fab AFM with automatic defect review Fully automated AFM solution for defect imaging and analysis that improves defect review productivity by up to 1,000%

Park NX-3DM brochure

Undercut and Overhang Profiling The NX-3DM allows unique access to the undercut and overhang structures of photoresist and other industrial materia...

 
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Park NX-3DM brochure Details

  • Undercut and Overhang Profiling The NX-3DM allows unique access to the undercut and overhang structures of photoresist and other industrial materials, ensuring users receive accurate topographical data throughout the entire sample

Park NX-Bio brochure

Discover the physiological phenomena of living cells at nanoscale As a life scientist, you want to see how biological materials look like at nanosc...

 
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Park NX-Bio brochure Details

  • Discover the physiological phenomena of living cells at nanoscale As a life scientist, you want to see how biological materials look like at nanoscale resolution and how soft they are in liquid and buffer conditions. Park NX-Bio enables that with its innovative in-liquid imaging Scanning Ion Conductance Microscopy (SICM) and its highly acclaimed Atomic Force Microscopy (AFM) technology.

Park NX10 brochure

The quickest path to innovative research Park NX10 produces data you can trust, replicate, and publish at the highest nano resolution. From sample ...

 
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Park NX10 brochure Details

  • The quickest path to innovative research Park NX10 produces data you can trust, replicate, and publish at the highest nano resolution. From sample setting to full scan imaging, measurement, and analysis, Park NX10 saves you time every step of the way. With more time and better data, you can focus on doing more innovative research.

Park NX20 brochure

The leading nano metrology tool for failure analysis and large sample research As an FA engineer, you’re expected to deliver results. There’s n...

 
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Park NX20 brochure Details

  • The leading nano metrology tool for failure analysis and large sample research As an FA engineer, you’re expected to deliver results. There’s no room for error in the data provided by your instruments. Park NX20, with its reputation as the world’s most accurate large sample AFM, is rated so highly in the semiconductor and hard disk industry for its data accuracy.

Park NX20_300mm brochure

Proven NX20 Performance with a 300 mm Sample Stage The NX20 is already the best choice for FA, QA, and QC engineers that need its unparalleled ease...

 
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Park NX20_300mm brochure Details

  • Proven NX20 Performance with a 300 mm Sample Stage The NX20 is already the best choice for FA, QA, and QC engineers that need its unparalleled ease of use and automation without compromising on accuracy. With its enlarged platform that supports a 300 mm motorized XY stage, the NX20 300mm takes this a step further, allowing users to inspect larger samples easily and with extremely high accuracy.

Park SmartScan brochure

Park SmartScan™ - Bringing the power and versatility of AFM technology to everyone...

 
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Park SmartScan brochure Details

  • Park SmartScan™ - Bringing the power and versatility of AFM technology to everyone

Park XE15 brochure

Increase your productivity with our powerfully versatile atomic force microscope The Park XE15 includes many unique capabilities that make it ideal...

 
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Park XE15 brochure Details

  • Increase your productivity with our powerfully versatile atomic force microscope The Park XE15 includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.

Park XE7 brochure

The economical choice for innovative research Park XE7 has all the state-of-the-art technology you've come to expect from Park Systems, at a price...

 
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Park XE7 brochure Details

  • The economical choice for innovative research Park XE7 has all the state-of-the-art technology you've come to expect from Park Systems, at a price your lab can afford. Designed with the same attention to detail as our more advanced models, the XE7 allows you to do your research on time and within budget.

Scanning Thermal Microscopy (SThM)

High Spatial and Thermal Resolution Microscopy by the XE-series Innovations....

 
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Scanning Thermal Microscopy (SThM) Details

  • High Spatial and Thermal Resolution Microscopy by the XE-series Innovations.

Ultimate Resolution of AFM in Air

“What is the ultimate resolution of AFM in air?” As significant as the answer to this question may be, it is equally important to clarify and de...

 
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Ultimate Resolution of AFM in Air Details

  • “What is the ultimate resolution of AFM in air?” As significant as the answer to this question may be, it is equally important to clarify and define the meaning of this very question.

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