| Sep 16, 2025 |
XY-Rotation stage with frictionless bearings is less that 40mm tall
Unique single-module 3-axis precision motion platform.
(Nanowerk News) PI (Physik Instrumente), a leader in precision motion control, has introduced the A-361 air-bearing XY-rotation stage, a compact nanopositioning platform engineered for ultra-high precision and stability in demanding research and industrial applications.
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The A-361 XY-rotation stage combines an exceptionally low profile of just 39.5mm with a generous 200mm diameter motion platform. It provides translational motion of 5mm in both X and Y, along with rotational motion around the Z axis of 2°.
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| Ultra-low profile 3-axis nanopositioning stage is less than 40mm tall. (Image: PI)
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Applications
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The A-361 PIglide XY-theta stage is particularly well suited for wafer inspection, flat-panel display metrology, fiber and optics alignment, maskless lithography, and µLED manufacturing. Its clean, non-contact design, combined with ultra-high stability and resolution, make it a compelling solution for semiconductor and photonics production environments.
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Frictionless Bearing Design, Lock-Down Mechanism for Ultra-High Stability
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With its frictionless air bearings and non-contact motors, the A-361 ensures smooth motion without wear, enabling virtually maintenance-free operation and a service life measured in decades. Integrated position-locking further enhances stability, eliminating servo jitter in critical measurement and alignment tasks. A built-in vacuum chuck accommodates wafers or other delicate substrates, making the stage well suited for semiconductor and optics applications.
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Frictionless Direct Drives, High Dynamics
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Voice-coil direct drives provide frictionless, highly dynamic response, generating up to 6N of continuous force and 19.2N peak. Despite its compact footprint, the A-361 supports payloads up to 3kg, and its lightweight design with hard-anodized aluminum construction ensures stability and durability.
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Designed for cleanroom operation, the A-361 requires only dry, oil-free compressed air in accordance with ISO 8573-1 purity standards. Air consumption is limited to 28L/min, making the system highly efficient for continuous operation. When combined with the A-523 Z Tip/Tilt Stage, the A-361 forms the basis of a versatile six-degree-of-freedom nanopositioning stack, enabling complete spatial control for precision alignment tasks in photonics, optics, and micro-assembly. Complementing the platform, PI provides integrated accessories such as air-preparation kits, multi-axis controllers, and custom cabling solutions, ensuring seamless system integration and enhanced performance.
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