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Postdoctoral Researcher Single Nanometer Patterning
Imec performs world-leading research in nano-electronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven (Belgium) and has offices in the Netherlands, Taiwan, US, China, Japan and India. Its staff of more than 2,000 people includes over 550 industrial residents and guest researchers. In our Process Technology (PT) unit we are currently looking for a (m/f) Postdoctoral Researcher in advanced processes, stacks and patterning flows for sub-5nm technology nodes.
In nano-manufacturing, pattern transfer relies on the use of reactive plasmas, where ions, neutrals and light react with the surface to be etched, and creating volatile products. An important question to address is the scalability of conventional plasma-based pattern transfer techniques when approaching atomic dimensions. In order to resolve these questions, imec joined an EU-funded ICT collaborative project entitled “Single Nanometer Manufacturing for Beyond CMOS devices” (acronym SNM), that will push lithography limits to the sub-5nm level.
The topic of this post-doctoral position will be, in a first stage, to develop innovative solutions for pushing the limits of conventional lithography down to the smallest dimensions, determine the most relevant hard-mask scheme for pattern transfer at sub-5nm dimensions, and determine the scaling properties of plasma etch processes over features scales in the range [10-100] nm. In a second stage, the gained learning will be applied to patterned samples provided by the SNM consortium, using namely electric-field tip-based patterning, thermal probe lithography, local anodic oxidation and electron-beam induced deposition. The first general objective is to compare the different SNM patterning approaches and to benchmark these with optical lithography and directed self-assembly. The second general objective is to make a profound understanding of the limitations of plasma etching for nano-features with atomic resolution, for both conductor etching (Silicon) and dielectric etching (SiO2), in terms of anisotropy (sidewall passivation), high aspect-ratio, vertical sidewalls, industry-relevant level of damage and sidewall roughness. In order to achieve these goals, most advanced plasma etch chamber and lithography techniques, available at imec and through the SNM partners, will be used.
You have a PhD in relevant scientific discipline e.g. nano-patterning by plasma technology.
You have knowledge of morphological inspection techniques (XSEM, TEM), plasma diagnostics, surface characterization methods (XPS, TOF-SIMS).
You have excellent reporting skills and are able to present scientific results (publications, conferences, seminars).
You are an enthusiastic team player and you are able to complete your tasks in time with minimal supervision.
You have good English communication skills.
This postdoctoral position is funded by imec through the KU Leuven. Because of the specific financing statute which targets international mobility for postdocs, only candidates who did not stay or work/study in Belgium for more than 24 months in the past 3 years can be considered for the position (short stays such as holiday, participation in conferences, etc. are not taken into account).
A challenging post doc position for 2 years in an advanced high-tech environment and in an international, interdisciplinary team focusing on plasma science (dry etching), working on leading-edge technologies. Further, we offer the opportunity to contribute to technologies that will have an impact on the society of tomorrow. The salary is competitive. Furthermore, imec offers various training possibilities and social services, such as a company restaurant, the possibility of day care, and discounts in different sport clubs and shops.