| Jun 16, 2026 |
Vacuum-compatible high load hexapod
Sub-micron precision and up to 200kg power-off holding capability.
(Nanowerk News) PI (Physik Instrumente), a global leader in precision motion control and nanopositioning technologies, announces the H-850.H2IV vacuum-compatible hexapod, a six-degree-of-freedom positioning system designed for high-precision alignment and motion control in demanding vacuum environments.
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| The new H-850.H2IV vacuum-compatible precision positioning hexapod system from parallel-kinematics specialist Physik Instrumente. (Image: PI)
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Engineered for operation in vacuum chambers down to 10⁻⁶ hPa, the H-850.H2IV combines sub-micron positioning accuracy with the ability to precisely manipulate loads of up to 80kg (176lbs). The system is designed for applications ranging from semiconductor manufacturing and lithography to synchrotron beamlines, optical alignment, aerospace testing, and advanced scientific research.
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The absolute encoder option provides immediate position information after power-up, eliminating homing procedures and improving machine availability.
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High Load Capacity for Vacuum Applications
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Many vacuum positioning applications require the movement and alignment of large optical assemblies, inspection equipment, sensors, or scientific instruments. The H-850.H2IV addresses this challenge with a load capacity of up to 80kg while maintaining repeatability to ±0.2µm and six-axis motion capability. The hexapod provides translational motion in X, Y, and Z. as well as rotational positioning in pitch, roll, and yaw, enabling precise alignment of complex systems in confined vacuum environments.
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Self-Locking Design Improves Stability and Safety – up to 200kg and 50kg in Any Orientation
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A key advantage of the H-850.H2IV Hexapod is its high self-holding force. The system can maintain heavy loads in position without power, providing exceptional stability during long measurement cycles, power interruptions, or sensitive alignment procedures. The self-locking drive design offers holding forces up to 200kg (440lbs) in horizontal orientation and 50kg (110lbs) in any orientation, minimizing drift and reducing power consumption while improving operational safety for expensive payloads and test objects.
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Advantages for Vacuum Operation – More Compact than Conventional 6-DOF Positioning Systems
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The H-850.H2IV hexapod is specifically engineered for vacuum environments. Because space inside vacuum chambers is often limited, the compact hexapod design provides significant advantages over traditional six-axis positioning systems built from stacked individual linear and rotary stages, delivering a smaller footprint, higher stiffness, and improved motion performance.
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Advantages of Parallel Kinematics
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Unlike stacked multi-axis systems, the H-850.H2IV employs a parallel-kinematic architecture in which six actuators move a common platform simultaneously. This design delivers higher stiffness, improved path accuracy, better repeatability, and lower moving mass. The result is a compact positioning system capable of handling large loads while maintaining excellent responsiveness and stability across all six axes. Since cables remain stationary, cable management challenges common in serial systems are eliminated.
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Digital Motion Simulation for System Protection
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To simplify integration, PI provides the PIVirtualMove simulation software. The software allows engineers to verify workspace limits, payload conditions, force and torque constraints, and center-of-gravity effects before deployment, helping optimize system performance and reduce project risk.
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With its combination of vacuum compatibility, high load capacity, sub-micron precision, and self-locking stability, the H-850.H2IV vacuum-compatible hexapod provides a powerful solution for advanced positioning tasks in research laboratories and industrial manufacturing environments worldwide.
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Industries Served and Applications
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Typical applications of the hexapod include the alignment of optics in vacuum chambers, lithography and inspection systems, beamline instrumentation, and satellite sensor testing.
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