Jul 29, 2025

Piezo phase shifter with tip-tilt correction features sub-nanometer resolution

Large-aperture, low profile, high stiffness - ideal for optics and interferometry.

(Nanowerk News) PI, a global leader in piezo nanopositioning and precision motion control equipment, announces the S-312 piezo phase shifter stage series with five aperture diameters ranging from Ø2" (53mm) to Ø12" (311mm). These U.S.-manufactured piezo stages can be mounted horizontally and vertically and are optimized for optical phase-shifting. Their high-stiffness mechanical design supports sub-nanometer steps with millisecond response times, enabling rapid and repeatable fringe shifting in demanding photonics setups.

Piezo phase shifters with tip-tilt correction feature sub-nanometer resolution and are made in the USA. (Image: PI)

Features and Benefits

Piezo stage for horizontally or vertically mounted optics
5 Variants with clear apertures from 53mm (2”) to 311mm (12”)
Low profile, from 28mm for easy integration
Tripod piezo design provides stiff platform and Z and Z-Tip-Tilt motion
Open-loop, analog voltage driven for economical control
15µm max displacement at 100V, ~1.5µm at 10V
Custom versions available, i.e. closed-loop and different form factors

Operation

The S-312 family of stages feature three long-life PICMA® piezo actuators, driven by an external analog amplifier in open-loop operation. The actuators can either be driven in parallel (piston motion) or individually for Z/Tip/Tilt operation with a 3-channel piezo amplifier. Displacement of each actuator is proportional to the analog drive voltage, allowing for straightforward integration and control. For example, a 10V input signal delivers roughly 10% of the stage’s total displacement range at 100V.

Custom phase shifter configurations are available with closed-loop control using integrated position sensors, along with a variety of form factors to fit unique system requirements. A 0.5-meter cable is standard, offered with both connectorized and pigtail options to maximize configuration flexibility.

Controller

PI’s compact E-836 piezo amplifier optimizes the S-312 stages performance as a cost-effective, low-noise module with a gain factor of 10 and an output voltage range from –30 V to +130 V. While delivering stability and responsiveness, this amplifier features short-circuit protection along with full overcurrent and overtemperature safeguards, ensuring reliable, long-term operation even under challenging conditions.

Source: PI (Note: Content may be edited for style and length)

*** DOI citation ***